by Jena Chu | Jul 2, 2024 | Industry Insights, Semiconductor Industry, Uncategorized
Chemical Mechanical Planarization (CMP) is a crucial process in semiconductor manufacturing, essential for creating a flat and even surface on semiconductor wafers. Understanding the CMP process and the role of temperature control can significantly enhance the quality...
by Jena Chu | Oct 19, 2023 | Semiconductor Industry
Process Details Process: Oxide Etch RF Power: 3.6kW (combined upper & lower electrode) Target Temperature (T Set-point): 20 °C at the lower electrode Chiller Comparison: OEM qualified compressor-based chiller vs. LAUDA-Noah POU system Data Acquisition System Setup...
by Jena Chu | Oct 18, 2023 | Industry Insights, Semiconductor Industry
In the realm of semiconductor manufacturing, precision and efficiency are critical. Temperature control within process chambers, especially the wafer chuck, is pivotal for consistent semiconductor fabrication. This post compares Dynamic Temperature Control and Static...
by Jena Chu | Sep 30, 2023 | Industry Insights, Semiconductor Industry
In the realm of semiconductor manufacturing, the importance of precise temperature control cannot be overstated. This is especially apparent in the dry etching process, where temperature management, particularly at the electrostatic chuck (ESC), plays a pivotal role....
